Design and Fabrication of Piezoelectric Β-poly(vinylidene Fluoride) Microactuators for Microfluidic Applications
نویسنده
چکیده
This paper reports on a fabrication method for producing piezoelectric poly(vinylidene fluoride) films in their electroactive β-phase that features controlled thickness, smooth and flat surface, and high transparency. These films are suitable for being used as integrated microactuators, such as piezoelectric pumps and/or mixers, in microfluidic applications. -PVDF films with a thickness of about 25 μm were deposited by spin-coating. It was concluded that the processing parameter that mostly affect the films quality is their drying temperature. Indeed, the drying temperature of 30 oC proved to be the most suitable for obtaining nonporous and transparent films with a β-phase content of 75%.
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